SUBSTRATE AND LIGHT-EMITTING ELEMENT
To provide a substrate having an aluminum nitride layer excellent in crystallinity.SOLUTION: A substrate 10 includes an aluminum nitride layer L1 containing crystalline aluminum nitride, and a sapphire layer L2 containing crystalline α-alumina. The aluminum nitride layer L1 is directly piled on the...
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Zusammenfassung: | To provide a substrate having an aluminum nitride layer excellent in crystallinity.SOLUTION: A substrate 10 includes an aluminum nitride layer L1 containing crystalline aluminum nitride, and a sapphire layer L2 containing crystalline α-alumina. The aluminum nitride layer L1 is directly piled on the surface of the sapphire layer L2, and the (0001) plane of the aluminum nitride is approximately parallel to the surface of the sapphire layer, and the (11-20) plane of the α-alumina is approximately parallel to the surface of the sapphire layer, and the (11-20) plane of the aluminum nitride is approximately parallel to the (1-100) plane of the α-alumina.SELECTED DRAWING: Figure 1
【課題】結晶性に優れた窒化アルミニウム層を有する基板の提供。【解決手段】基板10は、結晶質の窒化アルミニウムを含む窒化アルミニウム層L1と、結晶質のα-アルミナを含むサファイア層L2と、を備え、窒化アルミニウム層L1が、サファイア層L2の表面に直接重なっており、窒化アルミニウムの(0001)面が、サファイア層の表面に略平行であり、α-アルミナの(11−20)面が、サファイア層の表面に略平行であり、窒化アルミニウムの(11−20)面が、α-アルミナの(1−100)面に略平行である。【選択図】図1 |
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