REFLECTIVE X-ray OPTICAL ELEMENT, X-ray CONDENSING SYSTEM USING THE SAME, AND MANUFACTURING METHOD OF THE SAME

To provide a reflective optical element capable of accurately keeping (being installed in) a stable posture even with a compact configuration and a method for manufacturing the reflective optical element with high accuracy.SOLUTION: A reflective X-ray optical element 1A (1B) includes: a reflection p...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: MIMURA HIDEKAZU, HASHIZUME HIROKAZU, SHIMAMURA TAKENORI
Format: Patent
Sprache:eng ; jpn
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:To provide a reflective optical element capable of accurately keeping (being installed in) a stable posture even with a compact configuration and a method for manufacturing the reflective optical element with high accuracy.SOLUTION: A reflective X-ray optical element 1A (1B) includes: a reflection part 2 on which a reflection surface 20 for an X-ray is formed; and a grip part 3 which is continuously provided at an end part 2a in a direction orthogonal to a meridional direction as an optical axis direction and along the reflection surface 20 of the reflection part 2 and which extends in the meridional direction. The grip part 3 extends from the end part 2a of the reflection part 2 only in one direction along the meridional direction and is formed into a substantially L-shape.SELECTED DRAWING: Figure 5 【課題】小型であっても精度よく安定した姿勢に保持(設置)することができる反射型光学素子、および当該反射型光学素子を効率よく高精度に作製する方法を提供せんとする。【解決手段】X線の反射面20が形成された反射部2と、反射部2の前記反射面20に沿った光軸方向である子午線方向に直交する方向の端部2aに連続して設けられ、前記子午線方向に延びる把持部3とよりなる反射型X線光学素子1A(1B)であり、把持部3は、反射部2の端部2aから前記子午線方向に沿った一方向にのみ延設され、略L字状に構成した。【選択図】図5