MEMS DEVICE

To provide a MEMS device satisfactory in operation and excellent in connection reliability.SOLUTION: A MEMS device comprises: a wiring board 200; and a MEMS element 100 including a square frame-shaped support portion 110 having a first surface and a second surface opposite the first surface and an element portion 120 located on the first surface of the support portion 110; wherein the element portion 120 has: a frame portion 122 overlapping the support portion 110; and a functional portion 121 located inside the frame portion 122 and connected to the frame portion 122; wherein the second surface of the support portion 110 and the wiring board 200 are joined by a plurality of joining members 300 arranged spaced apart from each other at four respective side portions of the support portion 110; and wherein, of the four side portions of the support portion 110, an interval between the joining members 300 at a first side portion 113 is smaller than an interval between the joining members 300 at a second side portion 114.SELECTED DRAWING: Figure 1 【課題】動作が良好で接続信頼性に優れたＭＥＭＳ装置を提供すること。【解決手段】配線基板２００と、第１面および第１面の反対側の第２面を有する四角枠状の支持部１１０ならびに該支持部１１０の前記第１面上に位置する素子部１２０とを備えるＭＥＭＳ素子１００と、を含み、前記素子部１２０は、前記支持部１１０と重なる枠部１２２および該枠部１２２の内側に位置して前記枠部１２２に接続されている機能部１２１を有し、前記支持部１１０の前記第２面と前記配線基板２００とが、前記支持部１１０の４つの辺部のそれぞれにおいて互いに間隔を設けて配置された複数の接合部材３００で接合されており、前記支持部１１０の４つの辺部のうち、第１辺部１１３における接合部材３００の間隔は、第２辺部１１４における接合部材３００の間隔よりも小さいＭＥＭＳ装置。【選択図】図１