SEMICONDUCTOR WAFER CARRIER AND STORAGE CONTAINER

SEMICONDUCTOR WAFER CARRIER AND STORAGE CONTAINER

To provide a semiconductor wafer carrier and a storage container for stably mounting a semiconductor wafer.SOLUTION: Two grooves 33 are formed so as to be cut from the peripheral edges of carrier main bodies 31 on both sides of a central horizontal straight line with respect to a wafer mounted on a...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: CHANG CHI-SHENG, WU CHIN-TA, CHAN I-LIN, CIOU CHENG-HAO
Format: Patent
Sprache:eng ; jpn
Schlagworte:
ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR
BASIC ELECTRIC ELEMENTS
CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS
CONVEYING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HANDLING THIN OR FILAMENTARY MATERIAL
PACKAGES
PACKAGING ELEMENTS
PACKING
PERFORMING OPERATIONS
SEMICONDUCTOR DEVICES
STORING
TRANSPORTING
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Beschreibung
Zusammenfassung:To provide a semiconductor wafer carrier and a storage container for stably mounting a semiconductor wafer.SOLUTION: Two grooves 33 are formed so as to be cut from the peripheral edges of carrier main bodies 31 on both sides of a central horizontal straight line with respect to a wafer mounted on a mounting surface 310 and to extend along the radial direction with respect to the wafer. Fixing means 4 is arranged such that the wafer mounted on a carrier 3 is stably held on the mounting surface 310. The fixing means 4 is provided so as to stand upright with respect to the carrier 31 such that two fastening members 41 and 42 are accommodated corresponding to the grooves 33, respectively.SELECTED DRAWING: Figure 2 【課題】半導体ウエハを安定して載置する半導体ウエハのキャリア及び収納容器を提供する。【解決手段】２つの溝部３３がそれぞれ、載置面３１０に載置されるウエハに対しての中心水平直線を挟む両側のキャリア本体３１の周縁から切り込むと共にウエハに対しての径方向沿いに延伸するように形成されている。固定手段４が、キャリア３に載置されたウエハが載置面３１０に安定して保持されるように配置されている。固定手段４は、２つの留め部材４１、４２がそれぞれ溝部３３に対応して容置されるようにキャリア３１に対して直立するように設けられている。【選択図】図２