ION CURRENT MEASUREMENT DEVICE

To provide an ion current measurement device, applicable to analyzers such as a retarding potential type energy analyzer, and also capable of accurately measuring ion current.SOLUTION: An ion current measurement device 10 includes: a plurality of grids 11 arranged from front to back along a predetermined axis Z; a collection electrode 12 provided behind the plurality of grids 11; a main electrode 13 provided to be movable along the axis Z behind the collection electrode 12; a first ammeter 30 measuring current flowing through the main electrode 13; a blocking power supply 21 applying voltage forming an ion blocking electric field to the rearmost grid 11c among the plurality of grids 11; and a collection power supply 22 applying, to the collection electrode 12, a positive voltage with respect to the main electrode 13.SELECTED DRAWING: Figure 1 【課題】阻止電位型エネルギー分析器等の分析器に適用可能で、イオン電流の正確な測定が可能なイオン電流測定装置を提供する。【解決手段】イオン電流測定装置１０は、所定の軸Ｚに沿って前方から後方に配列する複数のグリッド１１と、複数のグリッド１１の後方に設けられる捕集電極１２と、捕集電極１２の後方に、軸Ｚに沿って移動可能に設けられる主電極１３と、主電極１３に流れる電流を計測する第１の電流計３０と、イオンの阻止電場を形成する電圧を複数のグリッド１１のうちの最後方のグリッド１１ｃに印加する阻止電源２１と、主電極１３に対して正の電圧を捕集電極１２に印加する捕集電源２２とを備える。【選択図】図１