HEIGHT DISTRIBUTION MEASURING DEVICE AND HEIGHT DISTRIBUTION MEASURING METHOD

To provide a height distribution measuring device and a height distribution measuring method, with which it is possible to simultaneously measure a portion where reflected light intensity is high and a portion where reflected light intensity is low with high accuracy when a measurement object having...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TOYODA CHIE, IKEDA TAKENORI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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