HEIGHT DISTRIBUTION MEASURING DEVICE AND HEIGHT DISTRIBUTION MEASURING METHOD

To provide a height distribution measuring device and a height distribution measuring method, with which it is possible to simultaneously measure a portion where reflected light intensity is high and a portion where reflected light intensity is low with high accuracy when a measurement object having a high reflectance portion and a low reflectance portion moves.SOLUTION: A height distribution measuring device 100 comprises: a light irradiation unit 110 for irradiating a measurement object M1 with light; an imaging unit 120 for imaging reflected light from the measurement object M1; and a diffraction grating 130 for causing light before entering the imaging unit 120 to be branched. The diffraction grating 130 causes incident light to be branched into two or more lights differing in intensity. The imaging unit 120 receives the lights branched by the diffraction grating 130.SELECTED DRAWING: Figure 1 【課題】 反射率が高い部分と反射率が低い部分とを有する計測対象物が移動する場合に反射光強度が高い部分と低い部分とを同時に高精度で測定することのできる高さ分布計測装置および高さ分布計測方法を提供することである。【解決手段】 高さ分布計測装置１００は、計測対象物Ｍ１に光を照射する光照射部１１０と、計測対象物Ｍ１からの反射光を撮像する撮像部１２０と、撮像部１２０に入射する前の光を分岐させる回折格子１３０と、を有する。回折格子１３０は、入射光を強度の異なる２以上の光に分岐させる。撮像部１２０は、回折格子１３０により分岐された光を受光する。【選択図】図１