VACUUM DRYER AND VACUUM DRYING METHOD

To provide a technique capable of improving the uniformity of vacuum drying processing.SOLUTION: A vacuum dryer according to one aspect of the present disclosure performs vacuum drying processing to dry a liquid on a substrate in a vacuum state. The vacuum dryer according to an embodiment includes a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	OGURA EIJI, OIKAWA JUNJI, NASU TOSHIFUMI, HAYASHI TERUYUKI, UEDA TOSHIHIKO
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS BLASTING DRYING DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY HEATING LIGHTING MECHANICAL ENGINEERING SEMICONDUCTOR DEVICES WEAPONS
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