POSITIVE TYPE PHOTOSENSITIVE COMPOSITION, PATTERN CURED FILM, AND METHOD FOR PRODUCING THE SAME

To provide a positive type photosensitive composition providing a cured film which maintains high sensitivity without impairing alkali solubility of a positive type photosensitive resin, and is excellent in chemical resistance.SOLUTION: A positive type photosensitive composition contains component (...

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Bibliographische Detailangaben
Hauptverfasser:	INENARI HIROSHI, FUJIMOTO KOHEI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CHEMISTRY CINEMATOGRAPHY COMPOSITIONS BASED THEREON ELECTROGRAPHY HOLOGRAPHY MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONSONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS MATERIALS THEREFOR METALLURGY ORGANIC MACROMOLECULAR COMPOUNDS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS THEIR PREPARATION OR CHEMICAL WORKING-UP
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Beschreibung
Zusammenfassung:	To provide a positive type photosensitive composition providing a cured film which maintains high sensitivity without impairing alkali solubility of a positive type photosensitive resin, and is excellent in chemical resistance.SOLUTION: A positive type photosensitive composition contains component (A): a compound increasing alkali solubility by action of an acid, component (B): a photoacid generator, and component (C): a compound containing two or more alkoxylated methylol groups in the molecule. A content of the component (C) is 1-20 pts.wt. with respect to 100 pts.wt. of the component (A).SELECTED DRAWING: None 【課題】ポジ型感光性樹脂のアルカリ溶解性を損なうことなく高感度を維持し、且つ耐薬品性に優れた硬化膜を与えるポジ型感光性組成物を提供する。【解決手段】ポジ型感光性組成物は、（Ａ）成分として酸の作用によりアルカリ溶解性が増大する化合物、（Ｂ）成分として光酸発生剤、（Ｃ）成分として分子内に二つ以上のアルコキシ化メチロール基を含有する化合物を含有し、前記（Ａ）成分１００重量部に対する前記（Ｃ）成分の含有量が１〜２０重量部である。【選択図】なし