PROBE PIN MATERIAL COMPRISING Rh-BASED ALLOY, AND PROBE PIN

To provide a probe pin material and a probe pin that are incorporated in a probe card for inspecting electrical characteristics of an integrated circuit or the like on a semiconductor wafer, and that have, needless to say, high conductivity, corrosion resistance and oxidation resistance, in order to...

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Bibliographische Detailangaben
Hauptverfasser:	MATSUZAWA ATSUHISA, YOKOTA SHUNSUKE, HASEGAWA KOICHI, HIGASHIMINE HISAYUKI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	ALLOYS CHEMISTRY FERROUS OR NON-FERROUS ALLOYS MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES METALLURGY PHYSICS TESTING TREATMENT OF ALLOYS OR NON-FERROUS METALS
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Beschreibung
Zusammenfassung:	To provide a probe pin material and a probe pin that are incorporated in a probe card for inspecting electrical characteristics of an integrated circuit or the like on a semiconductor wafer, and that have, needless to say, high conductivity, corrosion resistance and oxidation resistance, in order to obtain a stable inspection result, where the probe pin can maintain sufficient strength and low specific resistance enabling repeated contact with an inspection object.SOLUTION: A probe pin comprises an alloy which is an Rh-based alloy, and in which a total of 0.05-4.0 mass% of Hf and inevitable impurities together is 100 mass%.SELECTED DRAWING: None 【課題】半導体ウェハ上の集積回路等の電気的特性を検査するためのプローブカードに組み込まれるプローブピン用材料およびプローブピンに関し、安定した検査結果を得るために、高導電性はもちろん、耐食性、耐酸化性があり、検査対象物に繰り返し接触させるための十分な強度と低比抵抗を維持できるプローブピンを提供する。【解決手段】Ｒｈ基合金であって、Ｈｆが０．０５〜４．０ｍａｓｓ%および不可避不純物と合わせて合計で１００ｍａｓｓ%からなる合金からなるプローブピン。【選択図】なし