PROCESSING DEVICE
To provide a processing device capable of inhibiting deterioration of processing efficiency.SOLUTION: A processing device includes: a cassette placing table on which a cassette including storage racks, each of which stores one workpiece, is placed; a chuck table which holds the workpiece; a conveyan...
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| Format: | Patent |
| Sprache: | eng ; jpn |
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| Zusammenfassung: | To provide a processing device capable of inhibiting deterioration of processing efficiency.SOLUTION: A processing device includes: a cassette placing table on which a cassette including storage racks, each of which stores one workpiece, is placed; a chuck table which holds the workpiece; a conveyance unit which conveys the workpiece; a processing unit which processes the workpiece held by the chuck table; and a control unit. The conveyance unit includes: a workpiece detection section which inspects the storage racks included in the cassette placed on the cassette placement table one by one and detects the workpieces stored in the storage racks; and a conveyance section which conveys the workpieces from the cassette placed on the cassette placing table.SELECTED DRAWING: Figure 3
【課題】加工効率の低下を抑制することが可能な加工装置を提供する。【解決手段】被加工物をそれぞれ１枚ずつ収容する複数の収容棚を備えるカセットが載置されるカセット載置台と、被加工物を保持するチャックテーブルと、被加工物を搬送する搬送ユニットと、チャックテーブルによって保持された被加工物を加工する加工ユニットと、制御部と、を備える加工装置であって、搬送ユニットは、カセット載置台に載置されたカセットが備える複数の収容棚を１段ずつ検査し、複数の収容棚に収容されている被加工物を検出する被加工物検出部と、カセット載置台に載置されたカセットから被加工物を搬出する搬送部と、を備える。【選択図】図３ |
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