ANTISTATIC ADHESIVE TAPE
To provide an antistatic adhesive tape having excellent conductivity, heat resistance, solvent resistance and chemical resistance.SOLUTION: An antistatic adhesive tape 10 for semiconductor production equipment includes a resin layer 11 containing polyether ether ketone, and an antistatic adhesive la...
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Zusammenfassung: | To provide an antistatic adhesive tape having excellent conductivity, heat resistance, solvent resistance and chemical resistance.SOLUTION: An antistatic adhesive tape 10 for semiconductor production equipment includes a resin layer 11 containing polyether ether ketone, and an antistatic adhesive layer 12 laminated on the resin layer 11. The antistatic adhesive layer 12 contains the following components (A) and (B). Relative to the component (A) 100 pts.mass, the component (B) is 1-20 pts.mass. The component (A): a copolymer of a monomer mixture containing the following monomer (a1) 80-99.98 mass%, the following monomer (a2) 0.01-3 mass%, the following monomer (a3) 0.01-3 mass%. The monomer (a1): acrylic acid alkyl with a C4-8 alkyl group. The monomer (a2): acrylic acid hydroxyalkyl. The monomer (a3): acrylic acid. The component (B): conductive carbon black.SELECTED DRAWING: Figure 1
【課題】導電性、耐熱性、耐溶剤性及び耐薬品性に優れる制電粘着テープの提供。【解決手段】ポリエーテルエーテルケトンを含む樹脂層11と、前記樹脂層11に積層した制電粘着層12とを備えた、半導体製造設備用の制電粘着テープ10であって、前記制電粘着層12は、下記成分(A)及び下記成分(B)を含み、下記成分(A)100質量部に対する下記成分(B)の含有量が1〜20質量部である、制電粘着テープ10。成分(A):下記単量体(a1)80〜99.98質量%と、下記単量体(a2)0.01〜3質量%と、下記単量体(a3)0.01〜3質量%とを含む単量体混合物の共重合体。単量体(a1):アルキル基の炭素数が4〜8であるアクリル酸アルキル。単量体(a2):アクリル酸ヒドロキシアルキル。単量体(a3):アクリル酸。成分(B):導電性カーボンブラック。【選択図】図1 |
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