ADJUSTMENT METHOD FOR LASER PROCESSING APPARATUS

To provide an adjustment method for a laser processing apparatus, by which the center of a light condenser and the center of a laser beam emitted from a spatial light modulator can be appropriately made to coincide with each other.SOLUTION: An adjustment method for a laser processing apparatus includes: emitting a laser beam LB1 to an upper surface 10a of an inspection plate 10 so as to position a first condensing point P1 and capturing an image by use of imaging means 47; finding X coordinate and Y coordinate positions of the first condensing point P1 displayed by display means 50; emitting a laser beam LB1 to the upper surface 10a of the inspection plate 10 by use of Z-axis adjustment means 45A so as to position a second condensing point P2 and capturing an image by use of the imaging means 47; finding X coordinate and Y coordinate positions of the second condensing point P2 displayed by the display means 50; and making an optical axis of a spatial light modulator 43 coincide with a center of a light condenser 45 by adjusting the optical axis of the spatial light modulator 43 such that the X coordinate and Y coordinate positions of the first condensing point P1 and the X coordinate and Y coordinate positions of the second condensing point P2 coincide with each other.SELECTED DRAWING: Figure 2 【課題】集光器の中心と、空間光変調器から発せられるレーザー光線の中心とを調整して適切に一致させることができるレーザー加工装置の調整方法を提供する。【解決手段】検査板１０の上面１０ａにレーザー光線ＬＢ１の第一の集光点Ｐ１を位置付けて照射して撮像手段４７により撮像し、表示手段５０に表示された第一の集光点Ｐ１のＸ座標及びＹ座標位置を求め、Ｚ軸調整手段４５Ａによって検査板１０の上面１０ａにレーザー光線ＬＢ１の第二の集光点Ｐ２を位置付けて照射して撮像手段４７により撮像し、表示手段５０に表示された第二の集光点Ｐ２のＸ座標及びＹ座標位置を求め、第一の集光点Ｐ１のＸ座標及びＹ座標位置と、第二の集光点Ｐ２のＸ座標及びＹ座標位置とが一致するように空間光変調器４３の光軸の位置を調整することにより、空間光変調器４３の光軸を集光器４５の中心に一致させるレーザー加工装置の調整方法。【選択図】図２