VACUUM CHUCK AND JOINT DEVICE
To provide a technique capable of suppressing distortion to a substrate.SOLUTION: A vacuum chuck includes a first plate which forms a suction chamber for sucking the substrate in a space to the substrate and a rib partitioning the suction chamber into a plurality of rooms. The rib includes a mesh-li...
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| creator | SUGIHARA SHINTARO |
| description | To provide a technique capable of suppressing distortion to a substrate.SOLUTION: A vacuum chuck includes a first plate which forms a suction chamber for sucking the substrate in a space to the substrate and a rib partitioning the suction chamber into a plurality of rooms. The rib includes a mesh-like front end face in contact with the substrate.SELECTED DRAWING: Figure 12
【課題】基板の歪みを低減できる、技術を提供する。【解決手段】真空チャックは、基板との間に前記基板を吸引する吸引室を形成する第１プレートと、前記第１プレートの前記基板との対向面に設けられ、前記吸引室を複数の部屋に仕切るリブとを有する。前記リブは、前記基板と接触する網状の先端面を含む。【選択図】図１２ |
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【課題】基板の歪みを低減できる、技術を提供する。【解決手段】真空チャックは、基板との間に前記基板を吸引する吸引室を形成する第１プレートと、前記第１プレートの前記基板との対向面に設けられ、前記吸引室を複数の部屋に仕切るリブとを有する。前記リブは、前記基板と接触する網状の先端面を含む。【選択図】図１２</description><language>eng ; jpn</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; SEMICONDUCTOR DEVICES</subject><creationdate>2021</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20210603&DB=EPODOC&CC=JP&NR=2021086989A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76290</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20210603&DB=EPODOC&CC=JP&NR=2021086989A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>SUGIHARA SHINTARO</creatorcontrib><title>VACUUM CHUCK AND JOINT DEVICE</title><description>To provide a technique capable of suppressing distortion to a substrate.SOLUTION: A vacuum chuck includes a first plate which forms a suction chamber for sucking the substrate in a space to the substrate and a rib partitioning the suction chamber into a plurality of rooms. The rib includes a mesh-like front end face in contact with the substrate.SELECTED DRAWING: Figure 12
【課題】基板の歪みを低減できる、技術を提供する。【解決手段】真空チャックは、基板との間に前記基板を吸引する吸引室を形成する第１プレートと、前記第１プレートの前記基板との対向面に設けられ、前記吸引室を複数の部屋に仕切るリブとを有する。前記リブは、前記基板と接触する網状の先端面を含む。【選択図】図１２</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>SEMICONDUCTOR DEVICES</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2021</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZJANc3QODfVVcPYIdfZWcPRzUfDy9_QLUXBxDfN0duVhYE1LzClO5YXS3AxKbq4hzh66qQX58anFBYnJqXmpJfFeAUYGRoYGFmaWFpaOxkQpAgC55yFY</recordid><startdate>20210603</startdate><enddate>20210603</enddate><creator>SUGIHARA SHINTARO</creator><scope>EVB</scope></search><sort><creationdate>20210603</creationdate><title>VACUUM CHUCK AND JOINT DEVICE</title><author>SUGIHARA SHINTARO</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JP2021086989A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; jpn</language><creationdate>2021</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>SEMICONDUCTOR DEVICES</topic><toplevel>online_resources</toplevel><creatorcontrib>SUGIHARA SHINTARO</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>SUGIHARA SHINTARO</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>VACUUM CHUCK AND JOINT DEVICE</title><date>2021-06-03</date><risdate>2021</risdate><abstract>To provide a technique capable of suppressing distortion to a substrate.SOLUTION: A vacuum chuck includes a first plate which forms a suction chamber for sucking the substrate in a space to the substrate and a rib partitioning the suction chamber into a plurality of rooms. The rib includes a mesh-like front end face in contact with the substrate.SELECTED DRAWING: Figure 12
【課題】基板の歪みを低減できる、技術を提供する。【解決手段】真空チャックは、基板との間に前記基板を吸引する吸引室を形成する第１プレートと、前記第１プレートの前記基板との対向面に設けられ、前記吸引室を複数の部屋に仕切るリブとを有する。前記リブは、前記基板と接触する網状の先端面を含む。【選択図】図１２</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
| title | VACUUM CHUCK AND JOINT DEVICE |
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