VACUUM CHUCK AND JOINT DEVICE
To provide a technique capable of suppressing distortion to a substrate.SOLUTION: A vacuum chuck includes a first plate which forms a suction chamber for sucking the substrate in a space to the substrate and a rib partitioning the suction chamber into a plurality of rooms. The rib includes a mesh-li...
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Patent |
| Sprache: | eng ; jpn |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Zusammenfassung: | To provide a technique capable of suppressing distortion to a substrate.SOLUTION: A vacuum chuck includes a first plate which forms a suction chamber for sucking the substrate in a space to the substrate and a rib partitioning the suction chamber into a plurality of rooms. The rib includes a mesh-like front end face in contact with the substrate.SELECTED DRAWING: Figure 12
【課題】基板の歪みを低減できる、技術を提供する。【解決手段】真空チャックは、基板との間に前記基板を吸引する吸引室を形成する第１プレートと、前記第１プレートの前記基板との対向面に設けられ、前記吸引室を複数の部屋に仕切るリブとを有する。前記リブは、前記基板と接触する網状の先端面を含む。【選択図】図１２ |
|---|