SEMICONDUCTOR DEVICE

To provide a semiconductor device with higher reliability.SOLUTION: A semiconductor device includes a first electrode plate including a first surface and a second surface positioning on a rear surface side of the first surface, a second electrode plate disposed to face the first surface of the first...

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Bibliographische Detailangaben
Hauptverfasser: WATANABE NAOTAKE, MIZUTANI ASAMI, SEKIYA HIRONORI, ITO HIROAKI, ICHIKURA YUTA, TADA NOBUMITSU, KURI YUUJI, IIO HISATAKA, TASHIRO SHOTA
Format: Patent
Sprache:eng ; jpn
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Zusammenfassung:To provide a semiconductor device with higher reliability.SOLUTION: A semiconductor device includes a first electrode plate including a first surface and a second surface positioning on a rear surface side of the first surface, a second electrode plate disposed to face the first surface of the first electrode plate, at least one semiconductor element disposed between the first electrode plate and the second electrode plate and connected to the first electrode plate and the second electrode plate, a first cooler disposed to face the second surface of the first electrode plate, and a first intermediate member disposed between, and bonded to both the first electrode plate and the first cooler. The first intermediate member includes a laminate structure including a first layer with a first linear expansion coefficient, a second layer with a second linear expansion coefficient. The first layer is disposed so as to exist between the first electrode plate and the second layer. The linear expansion coefficient of the material of the first electrode plate is closer to the first linear expansion coefficient than to the second linear expansion coefficient. The linear expansion coefficient of the material of the first cooler is closer to the second linear expansion coefficient than to the first linear expansion coefficient.SELECTED DRAWING: Figure 1 【課題】信頼性を向上させた半導体装置を提供する。【解決手段】半導体装置は、第1表面と、前記第1表面の裏面側に位置する第2表面と、を有する第1電極板と、前記第1電極板の前記第1表面に対向して配置された第2電極板と、前記第1電極板と前記第2電極板との間に配置され、前記第1電極板および前記第2電極板に接続された少なくとも1つの半導体素子と、前記第1電極板の前記第2表面に対向して配置される第1冷却器と、前記第1電極板と前記第1冷却器の間に配置され、両者に接合される第1中間部材と、を備える。前記第1中間部材は、第1線膨張係数を有する第1層と、第2線膨張係数を有する第2層と、を含む積層構造を有し、前記第1電極板と前記第2層との間に前記第1層が位置するように配置される。前記第1電極板の材料の線膨張係数は、前記第2線膨張係数よりも前記第1線膨張係数に近く、前記第1冷却器の材料の線膨張係数は、前記第1線膨張係数よりも前記第2線膨張係数に近い。【選択図】図1