ELECTRON MICROSCOPE STAGE

To provide a positioning system and a method for accurately holding a workpiece within a charged particle beam system.SOLUTION: An electron microscope positioning system 110 includes a first carriage with a holder for holding a workpiece W, and a second carriage. The first carriage is coupled to one...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	ALBERT VISSCHER
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
Online-Zugang:	Volltext bestellen
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