SURFACE PROCESSING APPARATUS

To provide a surface processing apparatus capable of efficiently processing a workpiece.SOLUTION: One example of a surface processing apparatus may comprise a work holding tool including a first holding surface configured to hold a workpiece, and a planar grindstone tool configured to grind or polis...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	KUSANO TETSUYA, HONDA TOSHIFUMI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS DRESSING OR CONDITIONING OF ABRADING SURFACES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING SEMICONDUCTOR DEVICES TOOLS FOR GRINDING, BUFFING, OR SHARPENING TRANSPORTING
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Beschreibung
Zusammenfassung:	To provide a surface processing apparatus capable of efficiently processing a workpiece.SOLUTION: One example of a surface processing apparatus may comprise a work holding tool including a first holding surface configured to hold a workpiece, and a planar grindstone tool configured to grind or polish a surface of the workpiece being held by the work holding tool. The one example of the surface processing apparatus may further comprise a tool holding tool including a second holding surface facing the first holding surface and configured to hold the grindstone tool, and a driving mechanism configured to move at least one of the work holding tool and the tool holding tool along the first holding surface or the second holding surface.SELECTED DRAWING: Figure 1 【課題】本開示は、ワークの加工を効率的に行うことが可能な表面加工装置を説明する。【解決手段】表面加工装置の一例は、ワークを保持するように構成された第１の保持面を含むワーク保持具と、ワーク保持具に保持されているワークの表面を研削又は研磨するように構成された平面状の砥石工具とを備えていてもよい。表面加工装置の一例は、第１の保持面と対面すると共に砥石工具を保持するように構成された第２の保持面を含む工具保持具と、ワーク保持具及び工具保持具の少なくとも一方を、第１の保持面又は第２の保持面に沿って移動させるように構成された駆動機構とをさらに備えていてもよい。【選択図】図１