THREE-DIMENSIONAL LSI LAYOUT PATTERN DISPLAY DEVICE, METHOD, PROGRAM AND THREE-DIMENSIONAL LSI LAYOUT PATTERN GENERATION DEVICE

To solve the problem of conventional techniques by allowing a layout pattern to be displayed in a three-dimensionally visible manner to facilitate a structural analysis.SOLUTION: Using (i) two-dimensional figure data indicating the shapes and arrangements of multiple two-dimensional figures included in a LSI layout pattern including multiple layers and (ii) featured data indicating, for some three-dimensional figures, the thickness in the stacking direction of the layers to which they belong, and indicating that some other three-dimensional figures are generated while being expanded along the stacking direction to lower layers from their original two-dimensional figures in a range not extending to the inside of the other three-dimensional figures than themselves, three-dimensional figure data indicating shapes and arrangements of the respective three-dimensional figures generated by expanding the respective two-dimensional figures included in a region along the staking direction are generated, and the three-dimensional figures are displayed according to a predetermined stacking order, corresponding to the respective layers to which they belong.SELECTED DRAWING: Figure 5 【課題】レイアウトパターンを三次元可視化表示することにより構造解析を容易にし、従来技術が有していた上記課題を解決する。【解決手段】（ｉ）複数の層を含むＬＳＩレイアウトパターンに含まれる複数の二次元図形の形状と配置とを示す二次元図形データと、（ｉｉ）一部の三次元図形に対しては、自己の属する層の積層方向に関する厚みを示すとともに、別の一部の三次元図形に対しては、それが自己以外の三次元図形内部に及ばない範囲で自己の元となる二次元図形から下位層へと積層方向に沿って拡張されつつ生成される三次元図形であることを示すデータである特徴づけデータとを用いて、領域に含まれる二次元図形の各々を積層方向に沿って拡張することで生成される各々の三次元図形の形状と配置とを示す三次元図形データを生成し、三次元図形を、その各々が属する各々の層と対応づけて所定の積層順序に従って表示する。【選択図】図５