MANUFACTURING METHOD OF SUBSTRATE HOLDING UNIT, SUBSTRATE HOLDING MEMBER, SUBSTRATE HOLDING DEVICE, SUBSTRATE PROCESSING DEVICE, AND ELECTRONIC DEVICE

To provide a technique for better holding a substrate by using an adhesive member.SOLUTION: A substrate holding device has a plurality of substrate holding units for holding a substrate on a holding surface. Each of the substrate holding units has an adhesive member having an adhesive surface provid...

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Bibliographische Detailangaben
Hauptverfasser:	NABESHIMA TAKESHI, OKAWA AKIRA
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	To provide a technique for better holding a substrate by using an adhesive member.SOLUTION: A substrate holding device has a plurality of substrate holding units for holding a substrate on a holding surface. Each of the substrate holding units has an adhesive member having an adhesive surface provided with an adhesive material that adheres to the substrate, a tilting mechanism that allows the adhesive surface of the adhesive member to tilt with respect to the holding surface, and an advancing/retreating mechanism that allows the adhesive surface of the adhesive member to advance/retreat with respect to the holding surface.SELECTED DRAWING: Figure 2 【課題】粘着部材を用いて基板をより良好に保持するための技術を提供する。【解決手段】保持面において基板を保持するための複数の基板保持ユニットを有する基板保持装置であって、複数の基板保持ユニットの各々は、基板に粘着する粘着材料が設けられた粘着面を有する粘着部材と、粘着部材の粘着面を保持面に対して傾動可能とする傾動機構と、粘着部材の粘着面を保持面に対して進退可能とする進退機構を有する基板保持装置を用いる。【選択図】図２