CLAW PUMP
To provide a claw pump that can prevent overheating of a pump chamber even when used as a vacuum pump in a range of high vacuums, and that can remarkably improve the pump efficiency.SOLUTION: A claw pump includes: a pump chamber 10 that is formed by a cylinder part 10a, one end wall part 10b, and an...
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Zusammenfassung: | To provide a claw pump that can prevent overheating of a pump chamber even when used as a vacuum pump in a range of high vacuums, and that can remarkably improve the pump efficiency.SOLUTION: A claw pump includes: a pump chamber 10 that is formed by a cylinder part 10a, one end wall part 10b, and another end wall part 10c; two rotary shafts 20A, 20B; two rotors 30A, 30B having hook-shaped claw parts formed therein such that sucked gas can be compressed and exhausted; and an exhaust-side opening part 50 provided to be open at a position facing a portion, where gas in the pump chamber 10 is compressed, of at least one of the one end wall part 10b and the other end wall part 10c. The exhaust-side opening part 50 is formed by: a prior-stage vent hole 51 connected to the outside of the pump chamber 10 at a stage prior to the gas compression ratio being maximized; and a posterior-stage exhaust hole 52 connected to exhaust the gas to the outside of the pump chamber 10 by including a stage where the gas compression ratio is maximized and greater than at the prior stage.SELECTED DRAWING: Figure 1
【課題】真空ポンプとして、真空度が高い範囲で使用される場合でも、ポンプ室が過熱されることを防止でき、ポンプ効率を格段に向上できるクローポンプを提供する。【解決手段】シリンダ部10a、一方の端壁部10b、及び他方の端壁部10cで形成されたポンプ室10と、二つの回転軸20A、20Bと、吸入した気体を圧縮して排気できるように鉤形の爪部が形成された二つのロータ30A、30Bと、一方の端壁部10bと他方の端壁部10cとの少なくともどちらかの部位であって、ポンプ室10内における気体が圧縮される部位に面する位置に、開口されて設けられた排気側開口部50とを備え、その排気側開口部50が、気体の圧縮比が最大化する前段でポンプ室10の外部に連通される前段通気口51と、前記前段よりも気体の圧縮比が最大化する段階を含んでポンプ室10の外部へ排気するように連通される後段排気口52とによって設けられている。【選択図】図1 |
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