METERING PUMP DRIVE DEVICE AND COATING DEVICE

To provide a metering pump drive device that can monitor variation in viscosity or contamination of foreign matters in a fluid fed by a metering pump, and to provide a coating device using the same.SOLUTION: A metering pump drive device includes: a metering pump 52 for feeding a fluid by a constant...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: KUDO TOKI, OSHITA HIROSHI, TOKURA YASUHIRO
Format: Patent
Sprache:eng ; jpn
Schlagworte:
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