METERING PUMP DRIVE DEVICE AND COATING DEVICE
To provide a metering pump drive device that can monitor variation in viscosity or contamination of foreign matters in a fluid fed by a metering pump, and to provide a coating device using the same.SOLUTION: A metering pump drive device includes: a metering pump 52 for feeding a fluid by a constant...
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Format: | Patent |
Sprache: | eng ; jpn |
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