WAFER PROCESSING METHOD

To form a device chip without deteriorating quality.SOLUTION: A wafer processing method for dividing a wafer in which a plurality of devices are formed into individual device chips comprises a polyolefin-based sheet arranging step, an integrating step, a dividing step, and a picking-up step. The pol...

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Bibliographische Detailangaben
Hauptverfasser: ARAKAWA TARO, KAWAMURA SUMIKO, OMAE MAKIKO, YODO YOSHIAKI, MIYAI TOSHITERU, FUJII YUSUKE, MATSUZAWA MINORU, UENO MASAMITSU, HARADA SHIGENORI, KIUCHI ITSUTO
Format: Patent
Sprache:eng ; jpn
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