PRESSURE CONTROL VALVE, FLUID HANDLING STRUCTURE FOR LITHOGRAPHIC APPARATUS, AND LITHOGRAPHIC APPARATUS

To provide a pressure control valve, a fluid handling structure, and a lithographic apparatus.SOLUTION: A pressure control valve comprises: a passageway having a portion defining an opening; an obstructing member, displaceable relative to the opening, to obstruct the opening by differing amounts to...

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Hauptverfasser:	CORTILE ROGER HENDRIKUS MAGDALENA, KOEN CUYPERS, SUDHIR SRIVASTAVA, STEF MARTEN JOHAN JANSSENS, HENDRIKUS JOHANNES SCHELLENS, ADRIANUS MARINUS WOUTER HEEREN, EUMMELEN ERIK HENRICUS EGIDIUS CATHARINA, THEODORUS JOHANNES ANTONIUS RENCKENS, GOSEN JEROEN GERARD, BO LENSSEN
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	ACTUATING-FLOATS APPARATUS SPECIALLY ADAPTED THEREFOR BLASTING CINEMATOGRAPHY COCKS DEVICES FOR VENTING OR AERATING ELECTROGRAPHY ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING HOLOGRAPHY LIGHTING MATERIALS THEREFOR MECHANICAL ENGINEERING ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS TAPS THERMAL INSULATION IN GENERAL VALVES WEAPONS
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Beschreibung
Zusammenfassung:	To provide a pressure control valve, a fluid handling structure, and a lithographic apparatus.SOLUTION: A pressure control valve comprises: a passageway having a portion defining an opening; an obstructing member, displaceable relative to the opening, to obstruct the opening by differing amounts to regulate a volumetric flow rate of liquid and/or gas through the opening; a piezo actuator; and a linkage mechanism adapted to amplify a magnitude of a dimensional change in the piezo actuator and to use the dimensional change to displace the obstructing member. The linkage mechanism comprises a frame attached to a wall and fixed to the passageway at a first end, where a moveable portion of the frame is moveable in a first direction while being substantially restrained in a second direction. The piezo actuator extends between the wall and the moveable portion such that an expansion of the piezo actuator results in movement of the moveable portion in the first direction by an amount greater than the expansion. The moveable portion is connected to the obstructing member.SELECTED DRAWING: Figure 5 【課題】圧力制御弁、流体ハンドリング構造、及びリソグラフィ装置に関する。【解決手段】圧力制御弁は、開口を画定する部分を有する通路と、開口を様々な量で妨害し、開口を通る液体及び／又はガスの体積流量を調節するための、開口に対して変位可能な妨害部材と、圧電アクチュエータと、圧電アクチュエータの寸法変化の大きさを増幅させると共に当該寸法変化を用いて妨害部材を変位させるように適合されたリンク機構と、を備え、リンク機構は、第１の端部において壁に取り付けられると共に通路に固定されたフレームを備え、フレームの可動部分は、第１の方向に可動であるが第２の方向では実質的に拘束され、圧電アクチュエータの膨張によって当該膨張よりも大きい量の可動部分の第１の方向の移動が生じるように圧電アクチュエータは壁と可動部分との間に延出し、可動部分は妨害部材に接続されている。【選択図】図５