COMPOSITION FOR POLISHING, AND MANUFACTURING METHOD OF MAGNETIC DISK SUBSTRATE
To provide a composition for polishing that is used for polishing Ni-P substrates and has excellent scratch reduction performance while maintaining a practical polishing rate.SOLUTION: According to the present invention, a composition for polishing that is used for polishing a Ni-P substrate is prov...
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Format: | Patent |
Sprache: | eng ; jpn |
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Zusammenfassung: | To provide a composition for polishing that is used for polishing Ni-P substrates and has excellent scratch reduction performance while maintaining a practical polishing rate.SOLUTION: According to the present invention, a composition for polishing that is used for polishing a Ni-P substrate is provided. The composition for polishing contains silica particles, an acid, an oxidizing agent, a water-soluble polymer, and water. The composition for polishing contains, as the water-soluble polymer, a first water-soluble polymer having an anionic functional group and a second water-soluble polymer having a cationic functional group.SELECTED DRAWING: None
【課題】Ni−P基板の研磨に用いられて、実用的な研磨速度を維持しながら、優れたスクラッチ低減性能を有する研磨用組成物を提供すること。【解決手段】本発明によると、Ni−P基板の研磨に用いられる研磨用組成物が提供される。上記研磨用組成物は、シリカ粒子と、酸と、酸化剤と、水溶性高分子と、水とを含む。上記研磨用組成物は、上記水溶性高分子として、アニオン性官能基を有する第1の水溶性高分子と、カチオン性官能基を有する第2の水溶性高分子とを含む。【選択図】なし |
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