ELECTRONIC DEVICE

To reduce the deflection of a lid.SOLUTION: An electronic device includes a support substrate, a piezoelectric layer provided on the support substrate, a functional element including an electrode provided on the surface of the piezoelectric layer, a metal frame body provided on the support substrate...

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Bibliographische Detailangaben
Hauptverfasser:	IWABUCHI RYOTA, MARUYA YUKI, MIYAGAWA TAKU, KIKUCHI TSUTOMU, YAMAUCHI MOTOI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS BASIC ELECTRONIC CIRCUITRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS RESONATORS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	To reduce the deflection of a lid.SOLUTION: An electronic device includes a support substrate, a piezoelectric layer provided on the support substrate, a functional element including an electrode provided on the surface of the piezoelectric layer, a metal frame body provided on the support substrate and surrounding the piezoelectric layer and the functional element in a plan view, a metal lid that is provided on the frame body with a gap sandwiched between the metal lid and the support substrate, and seals the functional element in the gap, and a columnar body provided between the support substrate and the lid in the gap.SELECTED DRAWING: Figure 1 【課題】リッドの撓みを低減すること。【解決手段】支持基板と、前記支持基板上に設けられた圧電層と、前記圧電層の表面上に設けられた電極を含む機能素子と、平面視して、前記圧電層及び前記機能素子を囲んで前記支持基板上に設けられた金属製の枠体と、前記支持基板とで空隙を挟み前記枠体上に設けられ、前記機能素子を前記空隙内に封止する金属製のリッドと、前記空隙内において前記支持基板と前記リッドとの間に設けられた柱状体と、を備える電子デバイス。【選択図】図１