FLUID DEGASSING SYSTEM WITH REDUCED PRESSURE PULSATILITY

To provide a fluid degassing method, including providing a fluid degassing system that is controlled to substantially reduce permeate-side pressure fluctuations, including in relatively low-volume chambers.SOLUTION: The pressure fluctuations in a fluid degassing system may be diminished by independe...

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Bibliographische Detailangaben
Hauptverfasser: JOHN RUF, SIMS CARL, DAN LEAKE
Format: Patent
Sprache:eng ; jpn
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Beschreibung
Zusammenfassung:To provide a fluid degassing method, including providing a fluid degassing system that is controlled to substantially reduce permeate-side pressure fluctuations, including in relatively low-volume chambers.SOLUTION: The pressure fluctuations in a fluid degassing system may be diminished by independently controlling the intake phase and the exhaust phase of an evacuation pump 14. The speed of a drive element of the pump 14 may be modulated at least during the intake phase to more closely align with a pressure set point in a degassing module 12.SELECTED DRAWING: Figure 2 【課題】比較的小容積チャンバを含む、透過側の圧力変動を大幅に低減するように制御される流体脱気システムの提供を含む、流体脱気方法を提供する。【解決手段】流体脱気システムの圧力変動は、排気ポンプ14の吸気フェーズと排気フェーズを独立して制御することによって減少させることができる。ポンプ14の駆動要素の速度は、少なくとも吸気フェーズで変調して、脱気モジュール12の圧力設定点とより厳密に一致させることができる。【選択図】図2