LOAD LOCK DEVICE

To provide a device that reduces floating of particles from a pump above a substrate during evacuation in a load lock chamber.SOLUTION: A load lock device 100 comprises: a load lock chamber 110 that has a first transfer port 111 connecting to a transfer chamber 20 connected to a pressure reduction p...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TAKAGI SHINJI, FUKUDA NAOYA, TODA TETSURO, NOMURA SATOSHI, MIURA JUN, NEGISHI SATOSHI, SHIMOKAWA HIDETOSHI, SOEDA JUNYA, KUMAGAI SHUJI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!