ULTRAVIOLET IRRADIATION DEVICE AND ANNULAR CONVEX REMOVAL DEVICE

To provide an ultraviolet irradiation device and an annular convex removal device that can reduce power consumption and cost by using a UV LED light source.SOLUTION: An ultraviolet irradiation device 5 irradiates an ultraviolet curable adhesive tape 23 attached to a wafer 10 including a device regio...

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Bibliographische Detailangaben
Hauptverfasser:	URITA NAONORI, YOSHIMURA EIICHI, UEMURA YUJI, ESUMI KAZUYA
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS DRESSING OR CONDITIONING OF ABRADING SURFACES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	To provide an ultraviolet irradiation device and an annular convex removal device that can reduce power consumption and cost by using a UV LED light source.SOLUTION: An ultraviolet irradiation device 5 irradiates an ultraviolet curable adhesive tape 23 attached to a wafer 10 including a device region 14 on which a device is formed and an outer peripheral surplus region 15 surrounding the device region with ultraviolet rays. The ultraviolet irradiation device 5 includes an annular translucent portion 521 corresponding to an outer peripheral surplus region of the wafer, a mask portion 522 corresponding to the device region, a support plate 52 that supports the wafer via an adhesive tape, a UVLED light source 54 that irradiates the adhesive tape with ultraviolet rays via the translucent portion of the support plate, and a rotating unit 53 that moves the UVLED light source in the circumferential direction along the annular translucent portion.SELECTED DRAWING: Figure 8 【課題】ＵＶＬＥＤ光源を用いて消費電力を抑制しコストを低減することが可能な紫外線照射装置及び環状凸部除去装置を提供すること。【解決手段】紫外線照射装置５は、デバイスが形成されたデバイス領域１４とデバイス領域を囲繞する外周余剰領域１５とを備えるウェーハ１０に貼着された紫外線硬化型の粘着テープ２３に紫外線を照射する。紫外線照射装置５は、ウェーハの外周余剰領域に対応する環状の透光部５２１とデバイス領域に対応したマスク部５２２とを備え、粘着テープを介してウェーハを支持する支持板５２と、支持板の透光部を介して粘着テープに紫外線を照射するＵＶＬＥＤ光源５４と、ＵＶＬＥＤ光源を環状の透光部に沿って周方向に移動させる回転ユニット５３と、を備える。【選択図】図８