PLACEMENT TABLE AND SUBSTRATE PROCESSING APPARATUS

To prevent consumption of an adhesion layer used for a placement table.SOLUTION: A placement table which is expanded/contracted, includes: a wafer mounting part having a mounting face for mounting a wafer, in which a first penetration hole is formed; a base which is adhered by a first adhesion layer to a rear face of the wafer mounting part, and has an aperture larger than that of the first penetration hole, and in which a second penetration hole is formed to communicate with the first penetration hole; a cylindrical sleeve provided inside of the second penetration hole so as to be attached and detached to/from the base with a sealing member; and the sealing member which is provided between the rear face of the wafer mounting part and the sleeve so as to be separated from the first adhesion layer, and seals the first adhesion layer. A convex part is formed in a circumferential direction so as to be extended to at least one of an outer periphery or an inner periphery of a tip of the sleeve. The sealing member is pressed to the tip of the sleeve.SELECTED DRAWING: Figure 2 【課題】載置台に使用した接着層の消耗を防止する。【解決手段】ウエハを載置する載置面を有し、第１貫通孔が形成されたウエハ載置部と、前記ウエハ載置部の裏面に第１接着層によって接着され、前記第１貫通孔の孔径よりも大きい孔径を有し、前記第１貫通孔と連通する第２貫通孔が形成された基台と、前記第２貫通孔の内部に、封止部材とともに前記基台から脱着可能に設けられる筒状のスリーブと、前記ウエハ載置部の裏面と前記スリーブとの間に前記第１接着層と離間して設けられ、前記第１接着層を封止する前記封止部材と、を有し、前記スリーブの先端の外周又は内周の少なくともいずれかに延在して周方向に凸部が形成され、前記封止部材は、前記スリーブの先端に押し当てられ、伸縮する載置台が提供される。【選択図】図２