X-RAY GENERATOR

To provide an x-ray generator capable of suppressing a discharge of an electronic.SOLUTION: A window part 5 penetrates an X-ray XR ejected from a target from an X-ray passage 40b to an external part O. The window part 5 includes: a window frame part 51 in which a passage hole 511c into which the X-r...

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Bibliographische Detailangaben
Hauptverfasser: NARITA YOHEI, SUZUKI NAONOBU, NAKANO KOICHI
Format: Patent
Sprache:eng ; jpn
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Zusammenfassung:To provide an x-ray generator capable of suppressing a discharge of an electronic.SOLUTION: A window part 5 penetrates an X-ray XR ejected from a target from an X-ray passage 40b to an external part O. The window part 5 includes: a window frame part 51 in which a passage hole 511c into which the X-ray XR passes is formed; a first window member 52 which is fixed to the window frame part 51 in air tightness in a state of covering the first open 511d on the outer part O side in the passage hole 511c to make the X-ray XR pass; and a second window member 53 which is fixed to the window frame part 51 in a state of covering a second open 511e on a passage 40 side in the passage hole 511c, and makes the X-ray XR pass. The window part 5 provides a separation part 50a and a separation part 50b which are at least part of a ventilation part 50 communicating a region 5R between the first window member 52 and the second window member 53 of the passage hole 511c and an X-ray passage 40b. The ventilation part 50 is structured so that it cannot be viewed when viewing the region 5R side from the inside of the X-ray passage 40b.SELECTED DRAWING: Figure 4 【課題】電子の放出を抑制することができるX線発生装置を提供する。【解決手段】窓部5は、ターゲットから出射されたX線XRをX線通路40bから外部Оに透過させる。窓部5は、X線XRが通過する通過孔511cが形成された窓枠部51と、通過孔511cにおける外部O側の第1開口511dを覆った状態で窓枠部51に気密に固定され、X線XRを透過させる第1窓部材52と、通過孔511cにおける通路40側の第2開口511eを覆った状態で窓枠部51に固定され、X線XRを透過させる第2窓部材53と、を含む。窓部5には、通過孔511cのうち第1窓部材52と第2窓部材53との間の領域5Rと、X線通路40bと、を連通する通気部50の少なくとも一部である離間部50a及び離間部50bが設けられている。通気部50は、X線通路40b内から領域5R側を見た場合に見通せないように構成されている。【選択図】図4