STRAIN BODY
To provide a strain body capable of improving reliability while ensuring secure electrical connection between an electrode terminal and a lead wiring terminal, and a force sensor including the strain body.SOLUTION: A strain body 16 according to an embodiment includes: a center part 161; an outer per...
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Zusammenfassung: | To provide a strain body capable of improving reliability while ensuring secure electrical connection between an electrode terminal and a lead wiring terminal, and a force sensor including the strain body.SOLUTION: A strain body 16 according to an embodiment includes: a center part 161; an outer periphery part 162 enclosing surroundings of the center part; a plurality of connection parts 163 connecting the center part to the outer periphery part; a plurality of strain sensors S1 to S32 disposed on a principal face of the connection part; a plurality of reference resistances RS4 to RS30 which are disposed on the principal face of the center part and constituting bridge circuits together with the plurality of strain sensors; an electrode 171 which is disposed on the principal face of the center part and electrically connected to the plurality of strain sensors and the plurality of reference resistances, and takes detection signals from the bridge circuits; lead wiring 182 electrically connecting the electrode to the outside; and an anisotropic conductive film 181 disposed between the electrode and the lead wiring to electrically connect a terminal of the electrode and a terminal of the lead wiring.SELECTED DRAWING: Figure 13
【課題】電極端子とリード配線端子と間の確実な電気的接続を確保しつつ、信頼性を向上できる起歪体およびその起歪体を備えた力覚センサを提供する。【解決手段】実施形態に係る起歪体16は、中央部161と、中央部の周囲を囲む外周部162と、中央部と外周部とを接続する複数の接続部163と、接続部の主表面上に設けられる複数の歪センサS1〜S32と、中央部の主表面上に設けられ複数の歪センサと共にブリッジ回路を構成する複数の参照抵抗RS4〜RS30と、中央部の主表面上に設けられ複数の歪センサおよび複数の参照抵抗と電気的に接続されブリッジ回路の検出信号を取り出すための電極171と、電極と外部とを電気的に接続するリード配線182と、電極とリード配線との間に設けられ電極の端子とリード配線の端子とを電気的に接続する異方性導電フィルム181と、を具備する。【選択図】図13 |
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