HYDROGEN PEROXIDE GAS GENERATION DEVICE AND HYDROGEN PEROXIDE GAS GENERATION METHOD
To provide a hydrogen peroxide gas generation device and hydrogen peroxide gas generation method capable of supplying low-humidity hydrogen peroxide gas.SOLUTION: A device includes a container 2 where sodium percarbonate is accommodated, a heating apparatus 3 for heating the container 2, and a gas s...
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Zusammenfassung: | To provide a hydrogen peroxide gas generation device and hydrogen peroxide gas generation method capable of supplying low-humidity hydrogen peroxide gas.SOLUTION: A device includes a container 2 where sodium percarbonate is accommodated, a heating apparatus 3 for heating the container 2, and a gas supply path A for supplying a gas to the container 2; a humidified air is aerated to the container 2 via the gas supply path A. The heating apparatus 3 heats up the container 2 in a manner that the temperature of sodium percarbonate in the container 2 becomes 50°C or over and under 100°C. The absolute humidity of the humidified air is 2.0 g/m3 or over and under 16.0 g/m3.SELECTED DRAWING: Figure 1
【課題】低湿度な過酸化水素ガスを供給することのできる過酸化水素ガス発生装置および過酸化水素ガス発生方法を提供する。【解決手段】過炭酸ナトリウムが収容された容器2と、容器2を加熱する加熱装置3と、容器2に気体を供給する気体供給路Aと、を有し、気体供給路Aを介して加湿空気を容器2に通気する。加熱装置3は、容器2内の過炭酸ナトリウムの温度が、50℃以上100℃未満となるように容器2を加熱する。加湿空気の絶対湿度は、2.0g/m3以上16.0g/m3未満である。【選択図】図1 |
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