SUBSTRATE TRANSPORT DEVICE AND SUBSTRATE PROCESSING DEVICE

To provide a substrate transport device that enables substrate transport while minimizing the impact onto a surface of a substrate by top mounting rollers.SOLUTION: The substrate transport device includes: a plurality of transport shafts 4; a plurality of transport rollers 5 that are provided on the transport shafts 4 and support the underside of a substrate; an end part supporting roller 6 that supports the undersides of both ends of the substrate in the width direction; a top mounting roller shaft 7 that is rotatably supported facing parallel with the transport shaft above at least one end part and the other end part of the transport shaft 4; and a pair of top mounting rollers 8 that are provided in a portion of the top mounting roller shaft 7 that faces the end part supporting roller 6, the top mounting rollers 8 being attached through an elastic body so as to be vertically moveable against the top mounting roller shaft 7.SELECTED DRAWING: Figure 4 【課題】上載せローラによって基板表面に与える衝撃を最小限に抑えながら、基板搬送が可能な基板搬送装置を提供する。【解決手段】複数の搬送軸４と、搬送軸４に設けられる基板の下面を支持する複数の搬送ローラ５および基板の幅方向両端部の下面を支持する端部支持ローラ６と、搬送軸４の少なくとも一端部と他端部の上方に搬送軸と平行に対向させて回転可能に支持された上載せローラ軸７と、上載せローラ軸７の端部支持ローラ６と対向する部分に設けられる一対の上載せローラ８とを有し、上載せローラ８は上載せローラ軸７に対して上下動可能なように、弾性体を介して取り付けられていることを特徴とする。【選択図】図４