LIQUID ATOMIZING SYSTEM AND MIST GENERATING SYSTEM
To emit a stabler spray quantity of liquid droplet particles having a nanometer-size particle diameter.SOLUTION: A liquid atomizing system 1 includes a substrate 2, an IDT electrode 3 and a cover member 6. The IDT electrode 3 generates a surface acoustic wave on the substrate 2. The cover member 6 i...
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Zusammenfassung: | To emit a stabler spray quantity of liquid droplet particles having a nanometer-size particle diameter.SOLUTION: A liquid atomizing system 1 includes a substrate 2, an IDT electrode 3 and a cover member 6. The IDT electrode 3 generates a surface acoustic wave on the substrate 2. The cover member 6 is arranged alongside the IDT electrode 3 in a propagation direction of the surface acoustic wave when viewed from a thickness direction D0 of the substrate 2. The cover member 6 is provided on a side of a surface 21 of the substrate 2, and forms a gap 7 fed with object liquid 100, with the surface 21 of the substrate 2. The cover member 6 has a through hole 64. The through hole 64 passes through the cover member 6 in the thickness direction D0 and is formed at a position where the object liquid 100 supplied to the gap 7 is conveyed through the gap 7. In the liquid atomization system 1, the liquid droplet particles formed by atomization of the object liquid 100 on a prescribed region 211 superimposed on the through hole 64 of the surface 21 of the substrate 2 when viewed from the thickness direction D0 are emitted through the through hole 64.SELECTED DRAWING: Figure 1
【課題】ナノメートルサイズの粒径を有する液滴粒子を、より安定した噴霧量で放出させる。【解決手段】液体霧化システム1は、基板2と、IDT電極3と、カバー部材6と、を備える。IDT電極3は、基板2に表面弾性波を発生させる。カバー部材6は、基板2の厚さ方向D0から見て表面弾性波の伝搬方向においてIDT電極3に並んでいる。カバー部材6は、基板2の表面21側に設けられて基板2の表面21との間に対象液体100が供給される間隙7を形成している。カバー部材6は、貫通孔64を有する。貫通孔64は、カバー部材6を厚さ方向D0に貫通し、間隙7に供給された対象液体100が間隙7を通して搬送される位置に形成されている。液体霧化システム1では、厚さ方向D0から見て基板2の表面21のうち貫通孔64に重なる規定領域211上で対象液体100の霧化によって形成された液滴粒子が貫通孔64から放出される。【選択図】図1 |
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