ILLUMINATION METHOD, LUMINAIRE AND INSPECTION DEVICE
To provide an illumination method capable of improving wavelength evenness of illumination light, a luminaire, and an inspection device.SOLUTION: The illumination method according to the present invention includes the steps of: ranking (M×N) light sources LS in the order of wavelength of light emitt...
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| creator | KUSUSE HARUHIKO SATO SUNAO ISHIWATARI KENJI |
| description | To provide an illumination method capable of improving wavelength evenness of illumination light, a luminaire, and an inspection device.SOLUTION: The illumination method according to the present invention includes the steps of: ranking (M×N) light sources LS in the order of wavelength of light emitted by each light source LS; combing the first light source LS and the (M×N)-th light source LS to form a first pair PA1 and combing the a-th light source and the (M×N-a+1)-th light source to form a the a-th pair to thereby form a pair PA including the first pair PA1 through the (M×N/2)-th pair; when the light sources LS are aligned for each pair PA on the arrangement position of N light sources LS arranged on a substrate SU in one direction, arranging a prescribed pair PA on one end side in one direction and the pair PA behind the prescribed pair PA on the other end side, and arranging a pair PA behind the pair PA on the other end side between the pair PA on the one end side and the pair PA on the other end side; and using the N light sources LS arranged on the substrate SU for illumination.SELECTED DRAWING: Figure 1
【課題】照明光の波長の均一化を向上させることができる照明方法、照明装置及び検査装置を提供する。【解決手段】本発明に係る照明方法は、（Ｍ×Ｎ）個の光源ＬＳを、各光源ＬＳが生成する光の波長の順に順位付けするステップと、第１の光源ＬＳと第（Ｍ×Ｎ）の光源ＬＳとを第１ペアＰＡ１とし、第ａの光源と第（Ｍ×Ｎ−ａ＋１）の光源とを第ａペアとすることにより、第１ペアＰＡ１から第（Ｍ×Ｎ／２）ペアまで、ペアＰＡを形成するステップと、基板ＳＵ上に一方向に並んだＮ個の光源ＬＳの配置位置に、ペアＰＡ毎に光源ＬＳを並べて配置する際に、所定のペアＰＡを、一方向における一端側に配置し、所定のペアＰＡよりも後ろのペアＰＡを他端側に配置し、一端側のペアＰＡと他端側のペアＰＡとの間に、他端側のペアＰＡよりも後ろのペアＰＡを配置するステップと、基板ＳＵ上に配置されたＮ個の光源ＬＳを用いて照明するステップと、を備える。【選択図】図１ |
| format | Patent |
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【課題】照明光の波長の均一化を向上させることができる照明方法、照明装置及び検査装置を提供する。【解決手段】本発明に係る照明方法は、（Ｍ×Ｎ）個の光源ＬＳを、各光源ＬＳが生成する光の波長の順に順位付けするステップと、第１の光源ＬＳと第（Ｍ×Ｎ）の光源ＬＳとを第１ペアＰＡ１とし、第ａの光源と第（Ｍ×Ｎ−ａ＋１）の光源とを第ａペアとすることにより、第１ペアＰＡ１から第（Ｍ×Ｎ／２）ペアまで、ペアＰＡを形成するステップと、基板ＳＵ上に一方向に並んだＮ個の光源ＬＳの配置位置に、ペアＰＡ毎に光源ＬＳを並べて配置する際に、所定のペアＰＡを、一方向における一端側に配置し、所定のペアＰＡよりも後ろのペアＰＡを他端側に配置し、一端側のペアＰＡと他端側のペアＰＡとの間に、他端側のペアＰＡよりも後ろのペアＰＡを配置するステップと、基板ＳＵ上に配置されたＮ個の光源ＬＳを用いて照明するステップと、を備える。【選択図】図１</description><language>eng ; jpn</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES ; MEASURING ; PHYSICS ; SEMICONDUCTOR DEVICES ; TESTING</subject><creationdate>2021</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20210107&DB=EPODOC&CC=JP&NR=2021001806A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25543,76294</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20210107&DB=EPODOC&CC=JP&NR=2021001806A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>KUSUSE HARUHIKO</creatorcontrib><creatorcontrib>SATO SUNAO</creatorcontrib><creatorcontrib>ISHIWATARI KENJI</creatorcontrib><title>ILLUMINATION METHOD, LUMINAIRE AND INSPECTION DEVICE</title><description>To provide an illumination method capable of improving wavelength evenness of illumination light, a luminaire, and an inspection device.SOLUTION: The illumination method according to the present invention includes the steps of: ranking (M×N) light sources LS in the order of wavelength of light emitted by each light source LS; combing the first light source LS and the (M×N)-th light source LS to form a first pair PA1 and combing the a-th light source and the (M×N-a+1)-th light source to form a the a-th pair to thereby form a pair PA including the first pair PA1 through the (M×N/2)-th pair; when the light sources LS are aligned for each pair PA on the arrangement position of N light sources LS arranged on a substrate SU in one direction, arranging a prescribed pair PA on one end side in one direction and the pair PA behind the prescribed pair PA on the other end side, and arranging a pair PA behind the pair PA on the other end side between the pair PA on the one end side and the pair PA on the other end side; and using the N light sources LS arranged on the substrate SU for illumination.SELECTED DRAWING: Figure 1
【課題】照明光の波長の均一化を向上させることができる照明方法、照明装置及び検査装置を提供する。【解決手段】本発明に係る照明方法は、（Ｍ×Ｎ）個の光源ＬＳを、各光源ＬＳが生成する光の波長の順に順位付けするステップと、第１の光源ＬＳと第（Ｍ×Ｎ）の光源ＬＳとを第１ペアＰＡ１とし、第ａの光源と第（Ｍ×Ｎ−ａ＋１）の光源とを第ａペアとすることにより、第１ペアＰＡ１から第（Ｍ×Ｎ／２）ペアまで、ペアＰＡを形成するステップと、基板ＳＵ上に一方向に並んだＮ個の光源ＬＳの配置位置に、ペアＰＡ毎に光源ＬＳを並べて配置する際に、所定のペアＰＡを、一方向における一端側に配置し、所定のペアＰＡよりも後ろのペアＰＡを他端側に配置し、一端側のペアＰＡと他端側のペアＰＡとの間に、他端側のペアＰＡよりも後ろのペアＰＡを配置するステップと、基板ＳＵ上に配置されたＮ個の光源ＬＳを用いて照明するステップと、を備える。【選択図】図１</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</subject><subject>MEASURING</subject><subject>PHYSICS</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2021</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZDDx9PEJ9fX0cwzx9PdT8HUN8fB30VGACHkGuSo4-rkoePoFB7g6gxW4uIZ5OrvyMLCmJeYUp_JCaW4GJTfXEGcP3dSC_PjU4oLE5NS81JJ4rwAjAyNDAwNDCwMzR2OiFAEAGD4nvg</recordid><startdate>20210107</startdate><enddate>20210107</enddate><creator>KUSUSE HARUHIKO</creator><creator>SATO SUNAO</creator><creator>ISHIWATARI KENJI</creator><scope>EVB</scope></search><sort><creationdate>20210107</creationdate><title>ILLUMINATION METHOD, LUMINAIRE AND INSPECTION DEVICE</title><author>KUSUSE HARUHIKO ; SATO SUNAO ; ISHIWATARI KENJI</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JP2021001806A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; jpn</language><creationdate>2021</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</topic><topic>MEASURING</topic><topic>PHYSICS</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>KUSUSE HARUHIKO</creatorcontrib><creatorcontrib>SATO SUNAO</creatorcontrib><creatorcontrib>ISHIWATARI KENJI</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>KUSUSE HARUHIKO</au><au>SATO SUNAO</au><au>ISHIWATARI KENJI</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>ILLUMINATION METHOD, LUMINAIRE AND INSPECTION DEVICE</title><date>2021-01-07</date><risdate>2021</risdate><abstract>To provide an illumination method capable of improving wavelength evenness of illumination light, a luminaire, and an inspection device.SOLUTION: The illumination method according to the present invention includes the steps of: ranking (M×N) light sources LS in the order of wavelength of light emitted by each light source LS; combing the first light source LS and the (M×N)-th light source LS to form a first pair PA1 and combing the a-th light source and the (M×N-a+1)-th light source to form a the a-th pair to thereby form a pair PA including the first pair PA1 through the (M×N/2)-th pair; when the light sources LS are aligned for each pair PA on the arrangement position of N light sources LS arranged on a substrate SU in one direction, arranging a prescribed pair PA on one end side in one direction and the pair PA behind the prescribed pair PA on the other end side, and arranging a pair PA behind the pair PA on the other end side between the pair PA on the one end side and the pair PA on the other end side; and using the N light sources LS arranged on the substrate SU for illumination.SELECTED DRAWING: Figure 1
【課題】照明光の波長の均一化を向上させることができる照明方法、照明装置及び検査装置を提供する。【解決手段】本発明に係る照明方法は、（Ｍ×Ｎ）個の光源ＬＳを、各光源ＬＳが生成する光の波長の順に順位付けするステップと、第１の光源ＬＳと第（Ｍ×Ｎ）の光源ＬＳとを第１ペアＰＡ１とし、第ａの光源と第（Ｍ×Ｎ−ａ＋１）の光源とを第ａペアとすることにより、第１ペアＰＡ１から第（Ｍ×Ｎ／２）ペアまで、ペアＰＡを形成するステップと、基板ＳＵ上に一方向に並んだＮ個の光源ＬＳの配置位置に、ペアＰＡ毎に光源ＬＳを並べて配置する際に、所定のペアＰＡを、一方向における一端側に配置し、所定のペアＰＡよりも後ろのペアＰＡを他端側に配置し、一端側のペアＰＡと他端側のペアＰＡとの間に、他端側のペアＰＡよりも後ろのペアＰＡを配置するステップと、基板ＳＵ上に配置されたＮ個の光源ＬＳを用いて照明するステップと、を備える。【選択図】図１</abstract><oa>free_for_read</oa></addata></record> |
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| title | ILLUMINATION METHOD, LUMINAIRE AND INSPECTION DEVICE |
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