PRECURSOR SUPPLY CONTAINER

To provide a method that reduces the pressure loss to accurately measure the pressure inside a precursor supply container in a period during which vapor of the precursor is supplied and that allows the detachment or replacement of a pressure sensor even when the precursor remains in the container.SOLUTION: A precursor container 105 comprises: a storage unit 10 for storing a precursor; a carrier gas introduction line 11; a first carrier gas introduction valve 21; an inlet side joint 12; a precursor lead-out line 13; a first precursor lead-out valve 31; and an outlet side joint 14. A container pressure measuring unit 41 is provided at least one of between the first precursor lead-out valve 31 and the outlet side joint 14 and between the first carrier gas introduction valve 21 and the inlet side joint 12, and the container pressure measuring unit is detachably attached to a precursor supply device at the inlet side joint 12 and at the outlet side joint 14.SELECTED DRAWING: Figure 5 【課題】圧力損失を低減し、前駆体の蒸気を供給している期間は前駆体容器内部の圧力を正確に測定することができ、かつ、容器内に前駆体が残留する状態であっても圧力センサーの取り外しや交換をすることができる方法を提供する。【解決手段】前駆体を貯留する貯留部１０と、キャリアガス導入ライン１１と、第一キャリアガス導入弁２１と、入口側継手１２と、前駆体導出ライン１３と、第一前駆体導出弁３１と、出口側継手１４と、を有し、第一前駆体導出弁３１と出口側継手１４との間、および、第一キャリアガス導入弁２１と入口側継手１２との間の少なくとも一方に容器圧力測定部４１が設けられ、入口側継手１２および出口側継手１４において前駆体供給装置に着脱可能に取り付けられる、前駆体容器１０５。【選択図】図５