WAFER TRANSFER SYSTEM
To provide a wafer transfer system capable of preventing foreign matter from adhering to a wafer during transporting the wafer.SOLUTION: A wafer transfer system 10 includes: a robot (conveyance mechanism) 20 that conveys wafer 1; a clean chamber 30; and a fan (first blower mechanism) 40 that forms a...
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| creator | OTSUKI TAKAYUKI |
| description | To provide a wafer transfer system capable of preventing foreign matter from adhering to a wafer during transporting the wafer.SOLUTION: A wafer transfer system 10 includes: a robot (conveyance mechanism) 20 that conveys wafer 1; a clean chamber 30; and a fan (first blower mechanism) 40 that forms an airflow from the ceiling 31 to the bottom 32 of the clean chamber 30. The robot 20 includes: a hand unit 22 that holds a wafer 1; a fan (second blower mechanism) 70 that, when the hand unit 22 holds the wafer 1, forms an airflow from the bottom surface 1b side of the wafer 1 to the bottom 32 of the clean chamber 30; and a control unit that controls the drive state of the fan 70 depending on the presence or absence of the wafer 1 held by the hand unit 22.SELECTED DRAWING: Figure 3
【課題】ウエハを搬送する際、ウエハへの異物の付着を防止する。【解決手段】ウエハ搬送装置１０は、ウエハ１を搬送するロボット（搬送機構部）２０と、クリーン室３０と、クリーン室３０の天井部３１から底部３２側に向かう気流を形成するファン（第１送風機構部）４０と、を有する。ロボット２０は、ウエハ１を保持するハンド部２２と、ハンド部２２がウエハ１を保持した状態の時、ウエハ１の下面１ｂ側からクリーン室３０の底部３２に向かう気流を形成するファン（第２送風機構部）７０と、ハンド部２２によるウエハ１の保持の有無に応じて、ファン７０の駆動状態を制御する制御部と、を備える。【選択図】図３ |
| format | Patent |
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【課題】ウエハを搬送する際、ウエハへの異物の付着を防止する。【解決手段】ウエハ搬送装置１０は、ウエハ１を搬送するロボット（搬送機構部）２０と、クリーン室３０と、クリーン室３０の天井部３１から底部３２側に向かう気流を形成するファン（第１送風機構部）４０と、を有する。ロボット２０は、ウエハ１を保持するハンド部２２と、ハンド部２２がウエハ１を保持した状態の時、ウエハ１の下面１ｂ側からクリーン室３０の底部３２に向かう気流を形成するファン（第２送風機構部）７０と、ハンド部２２によるウエハ１の保持の有無に応じて、ファン７０の駆動状態を制御する制御部と、を備える。【選択図】図３</description><language>eng ; jpn</language><subject>BASIC ELECTRIC ELEMENTS ; CONVEYING ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; HANDLING THIN OR FILAMENTARY MATERIAL ; PACKING ; PERFORMING OPERATIONS ; PNEUMATIC TUBE CONVEYORS ; SEMICONDUCTOR DEVICES ; SHOP CONVEYOR SYSTEMS ; STORING ; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING ; TRANSPORTING</subject><creationdate>2020</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20201224&DB=EPODOC&CC=JP&NR=2020205299A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20201224&DB=EPODOC&CC=JP&NR=2020205299A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>OTSUKI TAKAYUKI</creatorcontrib><title>WAFER TRANSFER SYSTEM</title><description>To provide a wafer transfer system capable of preventing foreign matter from adhering to a wafer during transporting the wafer.SOLUTION: A wafer transfer system 10 includes: a robot (conveyance mechanism) 20 that conveys wafer 1; a clean chamber 30; and a fan (first blower mechanism) 40 that forms an airflow from the ceiling 31 to the bottom 32 of the clean chamber 30. The robot 20 includes: a hand unit 22 that holds a wafer 1; a fan (second blower mechanism) 70 that, when the hand unit 22 holds the wafer 1, forms an airflow from the bottom surface 1b side of the wafer 1 to the bottom 32 of the clean chamber 30; and a control unit that controls the drive state of the fan 70 depending on the presence or absence of the wafer 1 held by the hand unit 22.SELECTED DRAWING: Figure 3
【課題】ウエハを搬送する際、ウエハへの異物の付着を防止する。【解決手段】ウエハ搬送装置１０は、ウエハ１を搬送するロボット（搬送機構部）２０と、クリーン室３０と、クリーン室３０の天井部３１から底部３２側に向かう気流を形成するファン（第１送風機構部）４０と、を有する。ロボット２０は、ウエハ１を保持するハンド部２２と、ハンド部２２がウエハ１を保持した状態の時、ウエハ１の下面１ｂ側からクリーン室３０の底部３２に向かう気流を形成するファン（第２送風機構部）７０と、ハンド部２２によるウエハ１の保持の有無に応じて、ファン７０の駆動状態を制御する制御部と、を備える。【選択図】図３</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CONVEYING</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>HANDLING THIN OR FILAMENTARY MATERIAL</subject><subject>PACKING</subject><subject>PERFORMING OPERATIONS</subject><subject>PNEUMATIC TUBE CONVEYORS</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>SHOP CONVEYOR SYSTEMS</subject><subject>STORING</subject><subject>TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2020</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZBANd3RzDVIICXL0CwYxgiODQ1x9eRhY0xJzilN5oTQ3g5Kba4izh25qQX58anFBYnJqXmpJvFeAkQEImhpZWjoaE6UIAN4FH20</recordid><startdate>20201224</startdate><enddate>20201224</enddate><creator>OTSUKI TAKAYUKI</creator><scope>EVB</scope></search><sort><creationdate>20201224</creationdate><title>WAFER TRANSFER SYSTEM</title><author>OTSUKI TAKAYUKI</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JP2020205299A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; jpn</language><creationdate>2020</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CONVEYING</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>HANDLING THIN OR FILAMENTARY MATERIAL</topic><topic>PACKING</topic><topic>PERFORMING OPERATIONS</topic><topic>PNEUMATIC TUBE CONVEYORS</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>SHOP CONVEYOR SYSTEMS</topic><topic>STORING</topic><topic>TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>OTSUKI TAKAYUKI</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>OTSUKI TAKAYUKI</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>WAFER TRANSFER SYSTEM</title><date>2020-12-24</date><risdate>2020</risdate><abstract>To provide a wafer transfer system capable of preventing foreign matter from adhering to a wafer during transporting the wafer.SOLUTION: A wafer transfer system 10 includes: a robot (conveyance mechanism) 20 that conveys wafer 1; a clean chamber 30; and a fan (first blower mechanism) 40 that forms an airflow from the ceiling 31 to the bottom 32 of the clean chamber 30. The robot 20 includes: a hand unit 22 that holds a wafer 1; a fan (second blower mechanism) 70 that, when the hand unit 22 holds the wafer 1, forms an airflow from the bottom surface 1b side of the wafer 1 to the bottom 32 of the clean chamber 30; and a control unit that controls the drive state of the fan 70 depending on the presence or absence of the wafer 1 held by the hand unit 22.SELECTED DRAWING: Figure 3
【課題】ウエハを搬送する際、ウエハへの異物の付着を防止する。【解決手段】ウエハ搬送装置１０は、ウエハ１を搬送するロボット（搬送機構部）２０と、クリーン室３０と、クリーン室３０の天井部３１から底部３２側に向かう気流を形成するファン（第１送風機構部）４０と、を有する。ロボット２０は、ウエハ１を保持するハンド部２２と、ハンド部２２がウエハ１を保持した状態の時、ウエハ１の下面１ｂ側からクリーン室３０の底部３２に向かう気流を形成するファン（第２送風機構部）７０と、ハンド部２２によるウエハ１の保持の有無に応じて、ファン７０の駆動状態を制御する制御部と、を備える。【選択図】図３</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING |
| title | WAFER TRANSFER SYSTEM |
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