INSPECTION DEVICE, REDUCED-PRESSURE DRYING DEVICE, AND METHOD FOR CONTROLLING REDUCED-PRESSURE DRYING DEVICE

To provide: an inspection device capable of detecting a dry condition in a coated region at an early stage, the coated region being coated with an organic material on a substrate; a reduced-pressure drying device; and a method for controlling a reduced-pressure drying device.SOLUTION: An inspection...

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Bibliographische Detailangaben
Hauptverfasser:	SATAKE JUN, NISHIYAMA JUN, SADA TETSUYA, UEDA TOSHIHIKO
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS BLASTING DRYING DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY HEATING LIGHTING MECHANICAL ENGINEERING SEMICONDUCTOR DEVICES WEAPONS
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Beschreibung
Zusammenfassung:	To provide: an inspection device capable of detecting a dry condition in a coated region at an early stage, the coated region being coated with an organic material on a substrate; a reduced-pressure drying device; and a method for controlling a reduced-pressure drying device.SOLUTION: An inspection device according to one aspect of an embodiment includes an imaging section and a dry-condition detection section. The imaging section images a coated region where an organic material is coated on a substrate. The dry-condition detection section detects a dry condition of the coated region on the basis of the color density in the coated region imaged by the imaging section.SELECTED DRAWING: Figure 13 【課題】基板において有機材料が塗布された塗布領域の乾燥状態を早期に検出することができる検査装置、減圧乾燥装置および減圧乾燥装置の制御方法を提供することを目的とする。【解決手段】実施形態の一態様に係る検査装置は、撮像部と、乾燥状態検出部とを備える。撮像部は、基板において有機材料が塗布された塗布領域を撮像する。乾燥状態検出部は、撮像部によって撮像された塗布領域の色濃度に基づいて塗布領域の乾燥状態を検出する。【選択図】図１３