SINTERED OXIDE AND SPUTTERING TARGET

To provide a sintered oxide body in which occurrence of cracks can be suppressed.SOLUTION: A sintered oxide body comprises In, Zn and Fe, which contains substantially no crystal grains of zinc oxide and contains crystal grains of In oxide and crystal grains of ZnIn oxide. The crystal grains of the I...

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Bibliographische Detailangaben
Hauptverfasser:	TAO KOKI, MIYATA KOICHI, SHINODA TATSUAKI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	ARTIFICIAL STONE CEMENTS CERAMICS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS CONCRETE DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL LIME, MAGNESIA METALLURGY REFRACTORIES SLAG SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TREATMENT OF NATURAL STONE
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Beschreibung
Zusammenfassung:	To provide a sintered oxide body in which occurrence of cracks can be suppressed.SOLUTION: A sintered oxide body comprises In, Zn and Fe, which contains substantially no crystal grains of zinc oxide and contains crystal grains of In oxide and crystal grains of ZnIn oxide. The crystal grains of the In oxide are grains of In2O3 having a single phase crystal structure and are substantially free of Fe, and the crystal grains of the ZnIn oxide contain Fe.SELECTED DRAWING: Figure 1 【課題】本発明は、割れの発生を抑制可能な酸化物焼結体の提供を課題とする。【解決手段】本発明の一態様に係る酸化物焼結体は、Ｉｎ、Ｚｎ及びＦｅを含む酸化物焼結体であって、酸化亜鉛の結晶粒を実質的に有さず、Ｉｎ酸化物の結晶粒とＺｎＩｎ酸化物の結晶粒とを有し、上記Ｉｎ酸化物の結晶粒がＦｅを実質的に含まないＩｎ２Ｏ３結晶単相構造であり、上記ＺｎＩｎ酸化物の結晶粒がＦｅを含む。【選択図】図１