WIRING BOARD, ELECTRONIC APPARATUS, AND ELECTRONIC MODULE

To provide a wiring board having a SiC substrate, a NiSi layer ohmically joined to the SiC substrate, and a conductor film on the NiSi layer, and prevent interlayer separation of the films; and to provide an electronic apparatus and an electronic module having high reliability.SOLUTION: The wiring b...

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1. Verfasser: ITO SEIICHIRO
Format: Patent
Sprache:eng ; jpn
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Zusammenfassung:To provide a wiring board having a SiC substrate, a NiSi layer ohmically joined to the SiC substrate, and a conductor film on the NiSi layer, and prevent interlayer separation of the films; and to provide an electronic apparatus and an electronic module having high reliability.SOLUTION: The wiring board (1) comprises: a SiC substrate (10) that has a principal surface (S1); a NiSi layer (11A) that is ohmically joined to a partial range of the principal surface; and a conduction film (20A) that is located on the NiSi layer and the principal surface. An electronic apparatus comprises: the wiring board (1); and an electronic component mounted on the wiring board. The electronic module comprises: the electronic apparatus; and a substrate for a module that has the electronic apparatus mounted thereon.SELECTED DRAWING: Figure 1 【課題】SiC基板と、SiC基板にオーミック接合されるNiSi層と、NiSi層上の導体膜とを有する配線基板において、各膜の層間剥離を抑制する。高い信頼性を有する電子装置及び電子モジュールを提供する。【解決手段】この配線基板(1)は、主面(S1)を有するSiC基板(10)と、主面の一部の範囲にオーミック接合されたNiSi層(11A)と、NiSi層上から主面上にかけて位置する導体膜(20A)とを備える。電子装置は、配線基板(1)と、配線基板に搭載される電子部品とを備える。電子モジュールは、上記電子装置と、電子装置を搭載するモジュール用基板とを備える。【選択図】図1