SUBSTRATE FOR ELECTRICAL INSPECTION

To provide a substrate for electrical inspection the strength of which is improved.SOLUTION: A substrate 1 for electrical inspection comprises: a ceramic substrate 3 composed of a plurality of ceramic layers 11-17, each including a glass component, which are laminated one on top of another, and having a surface 3a and a reverse side 3b; and electrodes 4, 5 formed on at least one of the surface 3a and reverse side 3b of the ceramic substrate 3. The substrate 1 for electrical inspection comprises: a pair of outermost low thermal expansion ceramic layers 17, 11 respectively constituting the surface 3a and the reverse side 3b; a pair of high thermal expansion ceramic layers 16, 12 respectively disposed inward of the pair of outermost low thermal expansion ceramic layers 17, 11; and at least one of central low thermal expansion ceramic layers 13-15 disposed between the pair of high thermal expansion ceramic layers 16, 12. The thermal expansion coefficient of glass components in the high thermal expansion ceramic layers 16, 12 is larger than the thermal expansion coefficients of glass components in the outermost low thermal expansion ceramic layers 17, 11 and central low thermal expansion ceramic layers 13-15.SELECTED DRAWING: Figure 2 【課題】、強度を向上させた電気検査用基板の提供。【解決手段】本発明の電気検査用基板１は、各々がガラス成分を含む複数のセラミック層１１〜１７が互いに積層されてなり、表面３ａ及び裏面３ｂを有するセラミック基板３と、セラミック基板３の表面３ａ及び裏面３ｂの少なくとも一方に形成された電極４，５とを備える。電気検査用基板１は、表面３ａ及び裏面３ｂをそれぞれ構成する一対の最外低熱膨張セラミック層１７，１１と、一対の最外低熱膨張セラミック層１７，１１のそれぞれ内側に配される一対の高熱膨張セラミック層１６，１２と、一対の高熱膨張セラミック層１６，１２の間に配される少なくとも１つの中央低熱膨張セラミック層１３〜１５とを備える。高熱膨張セラミック層１６，１２におけるガラス成分の熱膨張係数は、最外低熱膨張セラミック層１７，１１及び中央低熱膨張セラミック層１３〜１５におけるガラス成分の熱膨張係数よりも、大きい。【選択図】図２