VACUUM FILM DEPOSITION APPARATUS AND VACUUM FILM DEPOSITION METHOD

To provide a vacuum film deposition apparatus and vacuum film deposition method, capable of preventing a long-sized resin film surface, etc., contacting the outer peripheral surface of a cooling can roll from being scratched.SOLUTION: A vacuum film deposition apparatus comprises: an unwinding chamber 100 for unwinding a long-sized resin film 1 wound around an unwinding roll 110; a film deposition chamber 400 for depositing a metal film on the first surface side of the long-sized resin film supplied from the unwinding chamber; and a winding chamber 500 for winding the long-sized resin film having the deposited metal film around a winding roll 541. The film deposition chamber comprises: a rotation drive cooling can roll 431 for winding the long-sized resin film conveyed by roll-to-roll around the outer peripheral surface to cool the resin film; and film deposition means 432-435 arranged along the outer peripheral surface of the cooling can roll and accompanying a heat load. A protective film superimposition chamber 300 for superimposing a protective film 301 on the second surface side of the long-sized resin film during the conveyance to interpose the protective film between the cooling can roll and the long-sized resin film is provided between the unwinding chamber and the film deposition chamber.SELECTED DRAWING: Figure 3 【課題】冷却キャンロールの外周面と接する長尺樹脂フィルム面等にスクラッチ傷が付き難い真空成膜装置と真空成膜方法を提供すること。【解決手段】巻出ロール110に巻回された長尺樹脂フィルム１を巻き出す巻出室100と、巻出室から供給された長尺樹脂フィルムの第一面側に金属膜を成膜する成膜室400と、金属膜が成膜された長尺樹脂フィルムを巻取ロール541に巻き取る巻取室500とを備え、成膜室がロールツーロールで搬送される長尺樹脂フィルムを外周面に巻き付けて冷却する回転駆動の冷却キャンロール431と、該冷却キャンロールの外周面に沿って配置された熱負荷を伴う成膜手段432〜435を有する真空成膜装置であって、上記巻出室と成膜室との間に、搬送中における長尺樹脂フィルムの第二面側に保護フィルム301を重合させて冷却キャンロールと長尺樹脂フィルムとの間に保護フィルムを介在させる保護フィルム重合室300が設けられていることを特徴とする。【選択図】図３