VACUUM DRYING DEVICE AND METHOD FOR MANUFACTURING SOLVENT COLLECTING MEMBER

To provide a vacuum drying device capable of making a drying state of a solvent uniform in a plane even for a large substrate.SOLUTION: A vacuum drying device for drying a solution on a substrate under reduced pressure, comprises a container accommodating the substrate, a placement table provided in...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	OIKAWA JUNJI, HAYASHI TERUYUKI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BLASTING DRYING DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM HEATING LIGHTING MECHANICAL ENGINEERING WEAPONS
Online-Zugang:	Volltext bestellen
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