VACUUM DRYING DEVICE AND METHOD FOR MANUFACTURING SOLVENT COLLECTING MEMBER

To provide a vacuum drying device capable of making a drying state of a solvent uniform in a plane even for a large substrate.SOLUTION: A vacuum drying device for drying a solution on a substrate under reduced pressure, comprises a container accommodating the substrate, a placement table provided in the container for placement of the substrate thereon, and a solvent collecting member which is provided in the container so as to face the substrate placed on the placement table and temporarily collects the solvent in the solution vaporized from the substrate. The solvent collecting member has a plurality of solvent collecting division members which are formed in a flat plate shape having a plurality of openings, and the plurality of solvent collecting division members are joined to each other at respective side ends in a plan view.SELECTED DRAWING: Figure 3 【課題】大型の基板であっても溶媒の乾燥状態を面内で均一にすることが可能な減圧乾燥装置を提供する。【解決手段】基板上の溶液を減圧下で乾燥させる減圧乾燥装置であって、前記基板を収容する容器と、前記容器内に設けられ、前記基板が載置される載置台と、前記載置台に載置された前記基板と対向するように前記容器内に設けられ、当該基板から気化した前記溶液中の溶媒を一時的に捕集する溶媒捕集部材とを備え、前記溶媒捕集部材は、複数の開口を有する平板状に形成された、溶媒捕集分割部材を複数有し、前記複数の溶媒捕集分割部材それぞれの平面視における側端同士を接合させてなる。【選択図】図３