VACUUM DRYING DEVICE

To make the drying time of a solution containing a plurality of solvents having different boiling points uniform in the plane of a substrate.SOLUTION: A vacuum drying device is for drying a solution on a substrate under reduced pressure, in which the solution contains a plurality of solvents having different boiling points from one another. The vacuum drying device has a container accommodating the substrate, and in the container, has a placement table on which the substrate is placed, a solvent collection part which temporarily collects the solvent in the solution vaporized from the substrate placed on the placement table, and a moving mechanism which moves the solvent collecting part in the vertical direction. The container is provided with exhaust ports connected to an exhaust device for exhausting the inside of container, below the placement table in the periphery of the placement table. The solvent collecting part is provided outside the substrate placed on the placement table in a plan view and is moved in the vertical direction by the moving mechanism outside the substrate.SELECTED DRAWING: Figure 2 【課題】沸点が互いに異なる複数の溶媒を含む溶液の乾燥時間を基板の面内で均一にする。【解決手段】基板上の溶液を減圧下で乾燥させる減圧乾燥装置であって、前記溶液は、互いに沸点が異なる複数の溶媒を含み、前記減圧乾燥装置は、前記基板を収容する容器を有し、前記容器内に、前記基板が載置される載置台と、前記載置台に載置された前記基板から気化した前記溶液中の溶媒を一時的に捕集する溶媒捕集部と、前記溶媒捕集部を上下方向に移動させる移動機構と、を有し、前記容器は、前記載置台の周辺における当該載置台より下側に、当該容器の内部を排気する排気装置に接続される排気口が設けられ、前記溶媒捕集部は、平面視における、前記載置台に載置された前記基板より外側に設けられており、前記基板より外側において前記移動機構により上下方向に移動される。【選択図】図２