APPARATUS FOR HOLDING, POSITIONING AND/OR MOVING OBJECT, AND METHOD OF OPERATING APPARATUS FOR HOLDING, POSITIONING AND/OR MOVING OBJECT

To provide an improved apparatus for holding, positioning and/or moving an object using magnetic bearings.SOLUTION: An apparatus for holding, positioning and/or moving an object includes a base (30), and a carrier (50) which is movable relative to the base (30). The apparatus further includes at lea...

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Bibliographische Detailangaben
Hauptverfasser: MARTIN AENIS, TIMO ADLER, CHRISTIAN WOLFGANG EHMANN, BRITTA SPAEH
Format: Patent
Sprache:eng ; jpn
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Beschreibung
Zusammenfassung:To provide an improved apparatus for holding, positioning and/or moving an object using magnetic bearings.SOLUTION: An apparatus for holding, positioning and/or moving an object includes a base (30), and a carrier (50) which is movable relative to the base (30). The apparatus further includes at least three magnetic bearings, by means of which the carrier (50) is supported on the base (30) in a contactless manner such that the carrier can be displaced with respect to at least one predefined direction, where at least two of the magnetic bearings (10) are configured as actively controllable magnetic bearings. The apparatus has at least one damping unit (100) which is fixed to the carrier (50) or to the base (30).SELECTED DRAWING: Figure 11 【課題】磁気軸受を使用して、物体を保持し、位置付け、及び/又は動かすための改良型の装置を提供する。【解決手段】物体を保持し、位置付け、かつ/又は動かすための装置は、ベース(30)と、ベース(30)に対して移動可能なキャリア(50)とを含む。装置は、少なくとも3つの磁気軸受であって、キャリアが少なくとも1つの所定の方向に関して変位しうるように、キャリア(50)が、これらの磁気軸受によって、非接触の様態でベース(30)のところで支持され、磁気軸受(10)のうちの少なくとも2つは、能動的に制御可能な磁気軸受として構成される、少なくとも3つの磁気軸受を更に含む。装置は、キャリア(50)又はベース(30)に固定される、少なくとも1つの制振ユニット(100)を有する。【選択図】図11