MODEL GAS RESPONSE CHARACTERISTIC INSPECTION DEVICE AND MODEL GAS RESPONSE CHARACTERISTIC INSPECTION METHOD

To provide a model gas response characteristic inspection device and a model gas response characteristic inspection method with which it is possible to cause a change of desired gas concentration to occur in a short time without being affected by an environment change or a change of desired gas concentration, and which is suitable for inspecting the dynamic characteristic of a gas sensor, etc.SOLUTION: Provided is a model gas response characteristic inspection device 10 for supplying a prescribed model gas from a model gas generation device 102 to a chamber 100 in which an inspection object is loaded, the model gas generation device 102 comprising a plurality of gas supply sources, a plurality of switches connected in correspondence to each gas supply source, a plurality of flowrate fixed nozzles connected in correspondence to each gas supply source and differing in flowrate, respectively, and a mixer 120 for mixing multiple kinds of gas from the plurality of flowrate fixed nozzles.SELECTED DRAWING: Figure 2 【課題】環境変化による影響や目的のガス濃度の変化の影響なしに、目的のガス濃度の変化を短時間に起こすことができ、ガスセンサ等の動特性を検査する上で好適なモデルガス応答特性検査装置及びモデルガス応答特性検査方法を提供する。【解決手段】検査対象が装着されたチャンバ１００に、モデルガス生成装置１０２から所定のモデルガスを供給して前記検査対象の応答特性を検査するモデルガス応答特性検査装置１０であって、モデルガス生成装置１０２は、複数のガス供給源と、各ガス供給源に対応して接続された複数の開閉器と、各ガス供給源に対応して接続され、それぞれ流量が異なる複数の流量固定ノズルと、複数の流量固定ノズルからの複数種のガスを混合する混合器１２０と、を有する。【選択図】図２