ELECTRIC HEATING WIRE, MANUFACTURING METHOD OF ELECTRIC HEATING WIRE, AND VACUUM TREATMENT APPARATUS

To provide an electric heating wire capable of elongating a lifetime, and its manufacturing method; and to provide a vacuum treatment apparatus using the electric heating wire.SOLUTION: An electric heating wire in one embodiment includes a core material, and a coating layer. In the core material, a...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	AOSHIRO MAKOTO, ASARI SHIN, NAKAMURA KYUZO, SAITO KAZUYA, YAMADA RYUZO
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	To provide an electric heating wire capable of elongating a lifetime, and its manufacturing method; and to provide a vacuum treatment apparatus using the electric heating wire.SOLUTION: An electric heating wire in one embodiment includes a core material, and a coating layer. In the core material, a carbide of tantalum is formed on the surface. The coating layer, in which at least either of boride of tantalum and boron is formed on the surface, is used for coating the core material.SELECTED DRAWING: Figure 2 【課題】高寿命化を図ることができる通電加熱線及びその製造方法並びに通電加熱線を用いた真空処理装置を提供する。【解決手段】本発明の一形態に係る通電加熱線は、芯材と、被覆層と、を具備する。上記芯材は、表面にタンタルの炭化物が形成される。上記被覆層は、表面にタンタルのホウ化物又はホウ素の少なくとも一方が形成され、上記芯材の表面を被覆する。【選択図】図２