TEMPERATURE CONTROL ROLLER, TRANSPORT STRUCTURE, AND VACUUM STRUCTURE
To solve problems of a conventional technology.SOLUTION: According to various embodiments, a temperature control roller (112) has: a cylindrical roller shell (112m) having gas outlet openings (112o); a temperature control device (1124) configured to supply heat energy to the roller shell (112m) and/...
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Sprache: | eng ; jpn |
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Zusammenfassung: | To solve problems of a conventional technology.SOLUTION: According to various embodiments, a temperature control roller (112) has: a cylindrical roller shell (112m) having gas outlet openings (112o); a temperature control device (1124) configured to supply heat energy to the roller shell (112m) and/or extract heat energy from the roller shell (112m); gas lines (112g) extending along a rotation axis; and a gas distribution structure (402) which connects the gas lines (112g) with the gas outlet openings (112o) in a manner that a gas is conducted therebetween. The gas distribution structure (402) has a structure density (1141) lower than the gas outlet openings (112o).SELECTED DRAWING: Figure 4
【課題】従来技術の問題を解消する。【解決手段】様々な実施形態によれば、温度制御ローラ(112)は、複数の気体出口開口(112o)を有する円筒状のローラシェル(112m)と、ローラシェル(112m)に熱エネルギを供給し且つ/或いはローラシェル(112m)から熱エネルギを抽出するように構成される、温度制御デバイス(1124)と、回転軸に沿って延びる複数の気体ライン(112g)と、複数の気体ライン(112g)と複数の気体出口開口(112o)とを気体伝導式に互いに連結する気体分配構造(402)とを有し、気体分配構造(402)は、複数の気体出口開口(112o)よりも低い構造密度(1141)を有する。【選択図】図4 |
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